JSM-IT210 Scanning Electron Microscope

Easy to acquire data for all specimen types

The JSM-IT210 is the most compact stationary scanning electron microscope of JEOL. The newly developed stage is motor-driven for all five axes of movement, making it safer and faster to use. In addition, the newly equipped "Simple SEM" automatically acquires observation and analysis by simply selecting the field of view. The JSM-IT210 is a new generation SEM that is compact and can be operated unattended.


Features

Guide from specimen exchange to automatic observation "Specimen Exchange Navi"

Follow the Navi to set specimen

Follow the Navi to set specimen

Prepare for observation during evacuation

Prepare for observation during evacuation

Start observation automatically

Start observation automatically

*1 The stage navigation system (SNS) is optional.
*2 SNSLS is optional. It can be used with SNS concurrently.
*3 The chamber scope (CS) is optional.

Magnify the optical image, transition to SEM image "Zeromag"

The Zeromag function simplifies navigation providing a seamless transition from optical* to SEM image. The SEM, optical image and holder graphic are all linked for a global view of analysis locations.

The Zeromag function simplifies navigation

 * Stage navigation system (SNS, optional) is required for optical image capture.

Embedded EDS for Real-Time elemental composition during observation* "Live Analysis"

Live Analysis is a function which displays the EDS spectrum or element maps in Real-Time during image observation. This function can support searching and provide an alert for target elements.

Embedded EDS for Real-Time elemental composition during observation

*A (Analysis) or LA (Low Vacuum & Analysis) models are required.

Automation for enhanced productivity "Simple SEM"

Simple SEM automates image collection at multiple locations, conditions and magnifications.

Simple SEM automates image collection at multiple locations, conditions and magnifications

Tools for speed

Stage with high position accuracy. Relocate analysis positions with gccuracy.

Stage with high position accuracy

Standard 60mm2 large diameter EDS* for fast analysis*

Fast analysis: the 60 mm2  sensor size EDS equipped as standard with JSM-IT210 can obtain the same quality in much less time than with smaller area detectors. Multi-point analysis can be also performed more efficiently.

Fast analysis Fast analysis

 

Application to heat-sensitive specimens: a small area EDS detector requires a large current for analysis. Heat-sensitive specimens are damaged due to beam irradiation, which negatively affects an elemental map.

Application to heat-sensitive specimens

Application to heat-sensitive specimens

The 60 mm2 EDS collects an element map with lower probe current. This enables fast analysis while minimizing damage caused by heat.

Fast, clear element maps: 60mm2 EDS collects a clear element map even by one minute measurement.

Fast, clear element maps Fast, clear element maps
Fast, clear element maps Fast, clear element maps
Fast, clear element maps Fast, clear element maps

Specimen: pallasite meteorite
Accelerating voltage: 15 kV
Measurement time: 1 minute

* This EDS is compatible with LV (Low Vacuum) and LA (Low Vacuum & Analysis) models.